# this file is part of refractiveindex.info database # refractiveindex.info database is in the public domain # copyright and related rights waived via CC0 1.0 REFERENCES: | N. Herguedas and E. Carretero. Optical properties in mid-infrared range of silicon oxide thin films with different stoichiometries. Nanomaterials 13, 2749 (2023) COMMENTS: | SiO_0.31. Sputtered Si with 10 sccm O₂ and 190 sccm Ar, which is equivalent to a oxygen partial pressure of 1.1 × 10^-4 mbar and a total pressure of 1.8 × 10^-3 mbar. Room temperature. DATA: - type: tabulated nk data: | 5.000 3.051 0.000 5.005 3.051 0.000 5.010 3.051 0.000 5.015 3.051 0.000 5.020 3.051 0.000 5.025 3.050 0.000 5.030 3.050 0.000 5.035 3.050 0.000 5.040 3.050 0.000 5.045 3.050 0.000 5.051 3.050 0.000 5.056 3.050 0.000 5.061 3.050 0.000 5.066 3.050 0.000 5.071 3.050 0.000 5.076 3.050 0.000 5.081 3.050 0.000 5.086 3.049 0.000 5.092 3.049 0.000 5.097 3.049 0.000 5.102 3.049 0.000 5.107 3.049 0.000 5.112 3.049 0.000 5.118 3.049 0.000 5.123 3.049 0.000 5.128 3.049 0.000 5.133 3.049 0.000 5.139 3.049 0.000 5.144 3.048 0.000 5.149 3.048 0.000 5.155 3.048 0.000 5.160 3.048 0.000 5.165 3.048 0.000 5.171 3.048 0.000 5.176 3.048 0.000 5.181 3.048 0.000 5.187 3.048 0.000 5.192 3.048 0.000 5.198 3.048 0.000 5.203 3.047 0.000 5.208 3.047 0.000 5.214 3.047 0.000 5.219 3.047 0.000 5.225 3.047 0.000 5.230 3.047 0.000 5.236 3.047 0.000 5.241 3.047 0.000 5.247 3.047 0.000 5.252 3.047 0.000 5.258 3.046 0.000 5.263 3.046 0.000 5.269 3.046 0.000 5.274 3.046 0.000 5.280 3.046 0.000 5.285 3.046 0.000 5.291 3.046 0.000 5.297 3.046 0.000 5.302 3.046 0.000 5.308 3.046 0.000 5.313 3.045 0.000 5.319 3.045 0.000 5.325 3.045 0.000 5.330 3.045 0.000 5.336 3.045 0.000 5.342 3.045 0.000 5.348 3.045 0.000 5.353 3.045 0.000 5.359 3.045 0.000 5.365 3.044 0.000 5.371 3.044 0.000 5.376 3.044 0.000 5.382 3.044 0.000 5.388 3.044 0.000 5.394 3.044 0.000 5.400 3.044 0.000 5.405 3.044 0.000 5.411 3.044 0.000 5.417 3.043 0.000 5.423 3.043 0.000 5.429 3.043 0.000 5.435 3.043 0.000 5.441 3.043 0.000 5.447 3.043 0.000 5.453 3.043 0.000 5.459 3.043 0.000 5.464 3.043 0.001 5.470 3.042 0.001 5.476 3.042 0.001 5.482 3.042 0.001 5.488 3.042 0.001 5.495 3.042 0.001 5.501 3.042 0.001 5.507 3.042 0.001 5.513 3.042 0.001 5.519 3.041 0.001 5.525 3.041 0.001 5.531 3.041 0.001 5.537 3.041 0.001 5.543 3.041 0.001 5.549 3.041 0.001 5.556 3.041 0.001 5.562 3.041 0.001 5.568 3.040 0.001 5.574 3.040 0.001 5.580 3.040 0.001 5.587 3.040 0.001 5.593 3.040 0.001 5.599 3.040 0.001 5.605 3.040 0.001 5.612 3.040 0.001 5.618 3.039 0.001 5.624 3.039 0.001 5.631 3.039 0.001 5.637 3.039 0.001 5.643 3.039 0.001 5.650 3.039 0.001 5.656 3.039 0.001 5.663 3.038 0.001 5.669 3.038 0.001 5.675 3.038 0.001 5.682 3.038 0.001 5.688 3.038 0.001 5.695 3.038 0.001 5.701 3.038 0.001 5.708 3.037 0.001 5.714 3.037 0.001 5.721 3.037 0.001 5.727 3.037 0.001 5.734 3.037 0.001 5.741 3.037 0.001 5.747 3.037 0.001 5.754 3.036 0.001 5.760 3.036 0.001 5.767 3.036 0.001 5.774 3.036 0.001 5.780 3.036 0.001 5.787 3.036 0.001 5.794 3.036 0.001 5.800 3.035 0.001 5.807 3.035 0.001 5.814 3.035 0.001 5.821 3.035 0.001 5.828 3.035 0.001 5.834 3.035 0.001 5.841 3.034 0.001 5.848 3.034 0.001 5.855 3.034 0.001 5.862 3.034 0.001 5.869 3.034 0.001 5.875 3.034 0.001 5.882 3.033 0.001 5.889 3.033 0.001 5.896 3.033 0.001 5.903 3.033 0.001 5.910 3.033 0.001 5.917 3.033 0.001 5.924 3.032 0.001 5.931 3.032 0.001 5.938 3.032 0.001 5.945 3.032 0.001 5.952 3.032 0.001 5.959 3.032 0.001 5.967 3.031 0.001 5.974 3.031 0.001 5.981 3.031 0.002 5.988 3.031 0.002 5.995 3.031 0.002 6.002 3.031 0.002 6.010 3.030 0.002 6.017 3.030 0.002 6.024 3.030 0.002 6.031 3.030 0.002 6.039 3.030 0.002 6.046 3.029 0.002 6.053 3.029 0.002 6.061 3.029 0.002 6.068 3.029 0.002 6.075 3.029 0.002 6.083 3.029 0.002 6.090 3.028 0.002 6.098 3.028 0.002 6.105 3.028 0.002 6.112 3.028 0.002 6.120 3.028 0.002 6.127 3.027 0.002 6.135 3.027 0.002 6.143 3.027 0.002 6.150 3.027 0.002 6.158 3.027 0.002 6.165 3.026 0.002 6.173 3.026 0.002 6.180 3.026 0.002 6.188 3.026 0.002 6.196 3.026 0.002 6.203 3.025 0.002 6.211 3.025 0.002 6.219 3.025 0.002 6.227 3.025 0.002 6.234 3.024 0.002 6.242 3.024 0.002 6.250 3.024 0.002 6.258 3.024 0.002 6.266 3.024 0.003 6.274 3.023 0.003 6.281 3.023 0.003 6.289 3.023 0.003 6.297 3.023 0.003 6.305 3.023 0.003 6.313 3.022 0.003 6.321 3.022 0.003 6.329 3.022 0.003 6.337 3.022 0.003 6.345 3.021 0.003 6.353 3.021 0.003 6.361 3.021 0.003 6.369 3.021 0.003 6.378 3.020 0.003 6.386 3.020 0.003 6.394 3.020 0.003 6.402 3.020 0.003 6.410 3.019 0.003 6.418 3.019 0.003 6.427 3.019 0.003 6.435 3.019 0.003 6.443 3.018 0.003 6.452 3.018 0.003 6.460 3.018 0.003 6.468 3.018 0.003 6.477 3.017 0.003 6.485 3.017 0.004 6.494 3.017 0.004 6.502 3.017 0.004 6.510 3.016 0.004 6.519 3.016 0.004 6.527 3.016 0.004 6.536 3.016 0.004 6.545 3.015 0.004 6.553 3.015 0.004 6.562 3.015 0.004 6.570 3.015 0.004 6.579 3.014 0.004 6.588 3.014 0.004 6.596 3.014 0.004 6.605 3.013 0.004 6.614 3.013 0.004 6.623 3.013 0.004 6.631 3.013 0.004 6.640 3.012 0.004 6.649 3.012 0.004 6.658 3.012 0.005 6.667 3.011 0.005 6.676 3.011 0.005 6.684 3.011 0.005 6.693 3.011 0.005 6.702 3.010 0.005 6.711 3.010 0.005 6.720 3.010 0.005 6.729 3.009 0.005 6.739 3.009 0.005 6.748 3.009 0.005 6.757 3.008 0.005 6.766 3.008 0.005 6.775 3.008 0.005 6.784 3.007 0.005 6.793 3.007 0.005 6.803 3.007 0.006 6.812 3.006 0.006 6.821 3.006 0.006 6.831 3.006 0.006 6.840 3.006 0.006 6.849 3.005 0.006 6.859 3.005 0.006 6.868 3.004 0.006 6.878 3.004 0.006 6.887 3.004 0.006 6.897 3.003 0.006 6.906 3.003 0.006 6.916 3.003 0.006 6.925 3.002 0.006 6.935 3.002 0.007 6.944 3.002 0.007 6.954 3.001 0.007 6.964 3.001 0.007 6.974 3.001 0.007 6.983 3.000 0.007 6.993 3.000 0.007 7.003 2.999 0.007 7.013 2.999 0.007 7.022 2.999 0.007 7.032 2.998 0.007 7.042 2.998 0.007 7.052 2.998 0.007 7.062 2.997 0.008 7.072 2.997 0.008 7.082 2.996 0.008 7.092 2.996 0.008 7.102 2.995 0.008 7.112 2.995 0.008 7.123 2.995 0.008 7.133 2.994 0.008 7.143 2.994 0.008 7.153 2.993 0.008 7.163 2.993 0.009 7.174 2.993 0.009 7.184 2.992 0.009 7.194 2.992 0.009 7.205 2.991 0.009 7.215 2.991 0.009 7.225 2.990 0.009 7.236 2.990 0.009 7.246 2.989 0.009 7.257 2.989 0.009 7.267 2.988 0.010 7.278 2.988 0.010 7.289 2.987 0.010 7.299 2.987 0.010 7.310 2.987 0.010 7.321 2.986 0.010 7.331 2.986 0.010 7.342 2.985 0.010 7.353 2.985 0.010 7.364 2.984 0.011 7.375 2.983 0.011 7.386 2.983 0.011 7.396 2.982 0.011 7.407 2.982 0.011 7.418 2.981 0.011 7.429 2.981 0.011 7.440 2.980 0.011 7.452 2.980 0.011 7.463 2.979 0.012 7.474 2.979 0.012 7.485 2.978 0.012 7.496 2.977 0.012 7.508 2.977 0.012 7.519 2.976 0.012 7.530 2.976 0.012 7.541 2.975 0.013 7.553 2.974 0.013 7.564 2.974 0.013 7.576 2.973 0.013 7.587 2.973 0.013 7.599 2.972 0.013 7.610 2.971 0.013 7.622 2.971 0.014 7.634 2.970 0.014 7.645 2.969 0.014 7.657 2.968 0.014 7.669 2.968 0.014 7.680 2.967 0.014 7.692 2.966 0.014 7.704 2.966 0.015 7.716 2.965 0.015 7.728 2.964 0.015 7.740 2.963 0.015 7.752 2.963 0.015 7.764 2.962 0.015 7.776 2.961 0.016 7.788 2.960 0.016 7.800 2.959 0.016 7.812 2.959 0.016 7.825 2.958 0.016 7.837 2.957 0.017 7.849 2.956 0.017 7.862 2.955 0.017 7.874 2.954 0.017 7.886 2.953 0.017 7.899 2.952 0.018 7.911 2.951 0.018 7.924 2.950 0.018 7.937 2.949 0.018 7.949 2.948 0.018 7.962 2.947 0.019 7.974 2.946 0.019 7.987 2.945 0.019 8.000 2.944 0.019 8.013 2.943 0.020 8.026 2.942 0.020 8.039 2.941 0.020 8.052 2.939 0.021 8.065 2.938 0.021 8.078 2.937 0.021 8.091 2.936 0.022 8.104 2.934 0.022 8.117 2.933 0.022 8.130 2.932 0.023 8.143 2.930 0.023 8.157 2.929 0.024 8.170 2.927 0.024 8.183 2.926 0.025 8.197 2.925 0.025 8.210 2.923 0.026 8.224 2.921 0.026 8.237 2.920 0.027 8.251 2.918 0.027 8.264 2.917 0.028 8.278 2.915 0.029 8.292 2.913 0.029 8.306 2.911 0.030 8.319 2.910 0.031 8.333 2.908 0.032 8.347 2.906 0.033 8.361 2.904 0.033 8.375 2.902 0.034 8.389 2.900 0.035 8.403 2.898 0.036 8.418 2.896 0.038 8.432 2.894 0.039 8.446 2.892 0.040 8.460 2.890 0.041 8.475 2.888 0.043 8.489 2.886 0.044 8.503 2.884 0.046 8.518 2.882 0.047 8.532 2.879 0.049 8.547 2.877 0.051 8.562 2.875 0.052 8.576 2.873 0.054 8.591 2.871 0.056 8.606 2.868 0.058 8.621 2.866 0.061 8.636 2.864 0.063 8.651 2.862 0.065 8.666 2.859 0.068 8.681 2.857 0.070 8.696 2.855 0.073 8.711 2.853 0.076 8.726 2.850 0.078 8.741 2.848 0.081 8.757 2.846 0.084 8.772 2.844 0.088 8.787 2.842 0.091 8.803 2.840 0.094 8.818 2.838 0.098 8.834 2.836 0.102 8.850 2.835 0.105 8.865 2.833 0.109 8.881 2.831 0.113 8.897 2.829 0.117 8.913 2.828 0.121 8.929 2.827 0.126 8.945 2.825 0.130 8.961 2.824 0.134 8.977 2.823 0.139 8.993 2.822 0.144 9.009 2.821 0.148 9.025 2.820 0.153 9.042 2.820 0.158 9.058 2.819 0.163 9.074 2.819 0.168 9.091 2.819 0.174 9.107 2.818 0.179 9.124 2.819 0.184 9.141 2.819 0.189 9.158 2.819 0.195 9.174 2.820 0.200 9.191 2.820 0.206 9.208 2.821 0.211 9.225 2.822 0.217 9.242 2.824 0.222 9.259 2.825 0.228 9.276 2.827 0.233 9.294 2.828 0.239 9.311 2.830 0.244 9.328 2.832 0.250 9.346 2.835 0.255 9.363 2.837 0.261 9.381 2.840 0.266 9.398 2.843 0.272 9.416 2.846 0.277 9.434 2.849 0.282 9.452 2.852 0.287 9.470 2.856 0.292 9.488 2.860 0.297 9.506 2.864 0.302 9.524 2.868 0.307 9.542 2.872 0.312 9.560 2.876 0.317 9.579 2.881 0.321 9.597 2.885 0.325 9.615 2.890 0.330 9.634 2.895 0.334 9.653 2.900 0.338 9.671 2.906 0.342 9.690 2.911 0.345 9.709 2.916 0.349 9.728 2.922 0.352 9.747 2.928 0.355 9.766 2.933 0.358 9.785 2.939 0.361 9.804 2.945 0.364 9.823 2.951 0.366 9.843 2.958 0.369 9.862 2.964 0.371 9.881 2.970 0.373 9.901 2.976 0.374 9.921 2.983 0.376 9.940 2.989 0.377 9.960 2.996 0.378 9.980 3.002 0.379 10.000 3.009 0.380 10.020 3.015 0.380 10.040 3.022 0.381 10.060 3.028 0.381 10.081 3.035 0.381 10.101 3.041 0.381 10.121 3.048 0.380 10.142 3.054 0.379 10.163 3.060 0.379 10.183 3.067 0.377 10.204 3.073 0.376 10.225 3.079 0.375 10.246 3.085 0.373 10.267 3.091 0.371 10.288 3.097 0.369 10.309 3.103 0.367 10.331 3.109 0.365 10.352 3.115 0.362 10.373 3.120 0.360 10.395 3.126 0.357 10.417 3.131 0.354 10.438 3.136 0.351 10.460 3.141 0.347 10.482 3.146 0.344 10.504 3.151 0.341 10.526 3.156 0.337 10.549 3.160 0.333 10.571 3.164 0.329 10.593 3.169 0.325 10.616 3.173 0.321 10.638 3.177 0.317 10.661 3.180 0.313 10.684 3.184 0.308 10.707 3.187 0.304 10.730 3.190 0.299 10.753 3.193 0.295 10.776 3.196 0.290 10.799 3.199 0.286 10.823 3.201 0.281 10.846 3.204 0.276 10.870 3.206 0.271 10.893 3.208 0.267 10.917 3.209 0.262 10.941 3.211 0.257 10.965 3.213 0.253 10.989 3.214 0.248 11.013 3.215 0.243 11.038 3.216 0.238 11.062 3.217 0.234 11.086 3.217 0.229 11.111 3.218 0.225 11.136 3.218 0.220 11.161 3.218 0.216 11.186 3.218 0.211 11.211 3.218 0.207 11.236 3.218 0.203 11.261 3.218 0.198 11.287 3.217 0.194 11.312 3.217 0.190 11.338 3.216 0.186 11.364 3.215 0.182 11.390 3.214 0.179 11.416 3.213 0.175 11.442 3.212 0.171 11.468 3.211 0.168 11.494 3.210 0.164 11.521 3.208 0.161 11.547 3.207 0.158 11.574 3.205 0.155 11.601 3.204 0.152 11.628 3.202 0.149 11.655 3.200 0.146 11.682 3.198 0.143 11.710 3.197 0.141 11.737 3.195 0.138 11.765 3.193 0.136 11.792 3.191 0.134 11.820 3.189 0.131 11.848 3.187 0.129 11.876 3.185 0.127 11.905 3.183 0.125 11.933 3.181 0.124 11.962 3.179 0.122 11.990 3.177 0.120 12.019 3.175 0.119 12.048 3.173 0.117 12.077 3.171 0.116 12.107 3.169 0.115 12.136 3.166 0.114 12.165 3.164 0.113 12.195 3.162 0.112 12.225 3.160 0.111 12.255 3.158 0.110 12.285 3.157 0.109 12.315 3.155 0.108 12.346 3.153 0.108 12.376 3.151 0.107 12.407 3.149 0.107 12.438 3.147 0.106 12.469 3.145 0.106 12.500 3.144 0.106 12.531 3.142 0.105 12.563 3.140 0.105 12.594 3.138 0.105 12.626 3.137 0.105 12.658 3.135 0.105 12.690 3.134 0.105 12.723 3.132 0.105 12.755 3.131 0.105 12.788 3.129 0.105 12.821 3.128 0.105 12.853 3.126 0.105 12.887 3.125 0.105 12.920 3.123 0.105 12.953 3.122 0.106 12.987 3.121 0.106 13.021 3.120 0.106 13.055 3.118 0.106 13.089 3.117 0.107 13.123 3.116 0.107 13.158 3.115 0.107 13.193 3.114 0.108 13.228 3.113 0.108 13.263 3.112 0.109 13.298 3.111 0.109 13.333 3.110 0.109 13.369 3.109 0.110 13.405 3.108 0.110 13.441 3.107 0.111 13.477 3.106 0.111 13.514 3.105 0.112 13.550 3.104 0.112 13.587 3.103 0.113 13.624 3.103 0.113 13.661 3.102 0.114 13.699 3.101 0.114 13.736 3.100 0.115 13.774 3.100 0.115 13.812 3.099 0.116 13.850 3.098 0.116 13.889 3.098 0.117 13.928 3.097 0.118 13.966 3.096 0.118 14.006 3.096 0.119 14.045 3.095 0.119 14.085 3.095 0.120 14.124 3.094 0.120 14.164 3.094 0.121 14.205 3.093 0.122 14.245 3.093 0.122 14.286 3.092 0.123 14.327 3.092 0.123 14.368 3.091 0.124 14.409 3.091 0.124 14.451 3.090 0.125 14.493 3.090 0.126 14.535 3.089 0.126 14.577 3.089 0.127 14.620 3.089 0.127 14.663 3.088 0.128 14.706 3.088 0.129 14.749 3.088 0.129 14.793 3.087 0.130 14.837 3.087 0.130 14.881 3.087 0.131 14.925 3.086 0.132 14.970 3.086 0.132 15.015 3.086 0.133 15.060 3.085 0.134 15.106 3.085 0.134 15.152 3.085 0.135 15.198 3.085 0.135 15.244 3.084 0.136 15.291 3.084 0.137 15.337 3.084 0.137 15.385 3.084 0.138 15.432 3.083 0.139 15.480 3.083 0.139 15.528 3.083 0.140 15.576 3.083 0.140 15.625 3.083 0.141 15.674 3.082 0.142 15.723 3.082 0.142 15.773 3.082 0.143 15.823 3.082 0.144 15.873 3.082 0.144 15.924 3.082 0.145 15.974 3.081 0.145 16.026 3.081 0.146 16.077 3.081 0.147 16.129 3.081 0.147 16.181 3.081 0.148 16.234 3.081 0.149 16.287 3.081 0.149 16.340 3.081 0.150 16.393 3.080 0.151 16.447 3.080 0.151 16.502 3.080 0.152 16.556 3.080 0.153 16.611 3.080 0.153 16.667 3.080 0.154 16.722 3.080 0.154 16.779 3.080 0.155 16.835 3.080 0.156 16.892 3.080 0.156 16.949 3.080 0.157 17.007 3.080 0.158 17.065 3.080 0.158 17.123 3.080 0.159 17.182 3.079 0.160 17.241 3.079 0.160 17.301 3.079 0.161 17.361 3.079 0.162 17.422 3.079 0.162 17.483 3.079 0.163 17.544 3.079 0.164 17.606 3.079 0.164 17.668 3.079 0.165 17.730 3.079 0.166 17.794 3.079 0.166 17.857 3.079 0.167 17.921 3.079 0.168 17.986 3.079 0.168 18.051 3.079 0.169 18.116 3.079 0.170 18.182 3.079 0.171 18.248 3.079 0.171 18.315 3.079 0.172 18.382 3.079 0.173 18.450 3.079 0.173 18.519 3.079 0.174 18.587 3.079 0.175 18.657 3.079 0.175 18.727 3.079 0.176 18.797 3.079 0.177 18.868 3.079 0.178 18.939 3.079 0.178 19.011 3.079 0.179 19.084 3.079 0.180 19.157 3.079 0.180 19.231 3.079 0.181 19.305 3.079 0.182 19.380 3.079 0.183 19.455 3.079 0.183 19.531 3.079 0.184 19.608 3.079 0.185 19.685 3.078 0.186 19.763 3.078 0.186 19.841 3.078 0.187 19.920 3.078 0.188 20.000 3.078 0.189 20.080 3.078 0.190 20.161 3.078 0.191 20.243 3.078 0.191 20.325 3.077 0.192 20.408 3.077 0.193 20.492 3.077 0.194 20.576 3.077 0.195 20.661 3.077 0.196 20.747 3.076 0.197 20.833 3.076 0.198 20.921 3.076 0.199 21.008 3.076 0.200 21.097 3.076 0.202 21.186 3.075 0.203 21.277 3.075 0.204 21.368 3.075 0.205 21.459 3.075 0.207 21.552 3.074 0.208 21.645 3.074 0.210 21.739 3.074 0.211 21.834 3.074 0.213 21.930 3.074 0.214 22.026 3.074 0.216 22.124 3.074 0.218 22.222 3.074 0.220 22.321 3.074 0.222 22.422 3.074 0.224 22.523 3.074 0.226 22.624 3.075 0.228 22.727 3.075 0.230 22.831 3.076 0.232 22.936 3.076 0.234 23.041 3.077 0.236 23.148 3.078 0.238 23.256 3.078 0.240 23.364 3.079 0.242 23.474 3.081 0.244 23.585 3.082 0.247 23.697 3.083 0.249 23.810 3.084 0.251 23.923 3.086 0.252 24.038 3.088 0.254 24.155 3.089 0.256 24.272 3.091 0.258 24.390 3.093 0.259 24.510 3.095 0.261 24.631 3.097 0.262 24.752 3.099 0.263 24.876 3.101 0.265 25.000 3.103 0.266